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Published:2020-03-09
Technical Parameters：
Material: ULE
Inspection equipment: 800-aperture interferometer ZYGO
Inspection result: RMS≤0.017λ within the range of Φ800mm
At any point where Φ 600mm is true, PV≤0.1λ, RMS≤0.0125λ (λ=632.8nm)
